SD Series

SD SERIES

Features

Inheritance and Evolution of Process Durability

Major Products

Model*1SDX600SDT600SDX1200SDT1200SDX1800SDT1800SDH3000*5SDH6000*5
Max. pumping speed
[L/min]*2 *6
10,00018,00019,00030,00050,000100,000
Ultimate pressure
[Pa] *2
0.50.30.5
Supply voltage(50/60Hz)3Phase, AC200~240V*7
N2 purge[SLM]0~800~120
Cooling water[L/min]3.04.03.04.03.04.04.04.0
Power consumption[kW]*31.53.01.653.152.13.33.33.7
Dimensions [mm]*4L6956958509101050
W285285380420515
H850850950900950

*1) SDX: Energy-saving, harsh process-compatible; SDT/SDH: Super harsh and process durable
*2) Data without heater nor N2 purge *3) Approximate data while ultimate pressure *4) Package dimension
*5) Please contact our sales representative for more information regarding the product lineup for even greater process robustness. (For information regarding compatible gases, please inquire with us.)
*6) The maximum pumping speed is an approximate value. *7) Contact us for other volotage options.

S-P Curve

S-P Curve

PDF Document

  1. Specifications and model names are subject to change without prior notice.
  2. Products displayed in this catalog must be approved for export in accordance with the Foreign and Foreign Trade Control Act. Before placing an export order, please contact our Sales Department.

mail address for inquiries: sales@kashiyama.com