Features
Inheritance and Evolution of Process Durability
Major Products
| Model*1 | SDX600 | SDT600 | SDX1200 | SDT1200 | SDX1800 | SDT1800 | SDH3000*5 | SDH6000*5 | |
| Max. pumping speed [L/min]*2 *6 | 10,000 | 18,000 | 19,000 | 30,000 | 50,000 | 100,000 | |||
| Ultimate pressure [Pa] *2 | 0.5 | 0.3 | 0.5 | ||||||
| Supply voltage(50/60Hz) | 3Phase, AC200～240V*7 | ||||||||
| N2 purge[SLM] | 0～80 | 0～120 | |||||||
| Cooling water[L/min] | 3.0 | 4.0 | 3.0 | 4.0 | 3.0 | 4.0 | 4.0 | 4.0 | |
| Power consumption[kW]*3 | 1.5 | 3.0 | 1.65 | 3.15 | 2.1 | 3.3 | 3.3 | 3.7 | |
| Dimensions [mm]*4 | L | 695 | 695 | 850 | 910 | 1050 | |||
| W | 285 | 285 | 380 | 420 | 515 | ||||
| H | 850 | 850 | 950 | 900 | 950 | ||||
*1) SDX: Energy-saving, harsh process-compatible; SDT/SDH: Super harsh and process durable
*2) Data without heater nor N2 purge *3) Approximate data while ultimate pressure *4) Package dimension
*5) Please contact our sales representative for more information regarding the product lineup for even greater process robustness. (For information regarding compatible gases, please inquire with us.)
*6) The maximum pumping speed is an approximate value. *7) Contact us for other volotage options.
S-P Curve
PDF Document
- Specifications and model names are subject to change without prior notice.
- Products displayed in this catalog must be approved for export in accordance with the Foreign and Foreign Trade Control Act. Before placing an export order, please contact our Sales Department.
mail address for inquiries: sales@kashiyama.co.jp